LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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===Publications as first author === | ===Publications as first author === | ||
'''DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process''' | *;'''DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process''' | ||
<u>Chang, B.</u>, Leussink, P., Jensen, F., Hübner, J. and Jansen, H., | :<u>Chang, B.</u>, Leussink, P., Jensen, F., Hübner, J. and Jansen, H., | ||
Microelectronic Engineering, 191, pp.77-83 (2018) [https://doi.org/10.1016/j.mee.2018.01.034 DOI] | :Microelectronic Engineering, 191, pp.77-83 (2018) [https://doi.org/10.1016/j.mee.2018.01.034 DOI] | ||
'''DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro-and nanostructures by a modified Bosch etch process''' | *;'''DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro-and nanostructures by a modified Bosch etch process''' | ||
<u>Chang, B.</u>, Jensen, F., Hübner, J. and Jansen, H | :<u>Chang, B.</u>, Jensen, F., Hübner, J. and Jansen, H | ||
Journal of Micromechanics and Microengineering, 28(10), p.105012 (2018) [https://doi.org/10.1088/1361-6439/aad0c4 DOI] | :Journal of Micromechanics and Microengineering, 28(10), p.105012 (2018) [https://doi.org/10.1088/1361-6439/aad0c4 DOI] | ||
'''Confined Growth of ZIF‐8 Nanocrystals with Tunable Structural Colors''' | *;'''Confined Growth of ZIF‐8 Nanocrystals with Tunable Structural Colors''' | ||
<u>Chang, B.</u>, Yang, Y., Jansen, H., Ding, F., Mølhave, K. and Sun, H. | :<u>Chang, B.</u>, Yang, Y., Jansen, H., Ding, F., Mølhave, K. and Sun, H. | ||
Advanced Materials Interfaces, 5(9), p.1701270 (2018) [https://doi.org/10.1002/admi.201701270 DOI] | :Advanced Materials Interfaces, 5(9), p.1701270 (2018) [https://doi.org/10.1002/admi.201701270 DOI] | ||
'''Highly Ordered 3D Silicon Micro‐Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion''' | *;'''Highly Ordered 3D Silicon Micro‐Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion''' | ||
<u>Chang, B.</u>, Tang, Y., Liang, M., Jansen, H., Jensen, F., Wang, B., Mølhave, K., Hübner, J. and Sun, H. | :<u>Chang, B.</u>, Tang, Y., Liang, M., Jansen, H., Jensen, F., Wang, B., Mølhave, K., Hübner, J. and Sun, H. | ||
ChemNanoMat (2018) [https://doi.org/10.1002/cnma.201800371 DOI] | :ChemNanoMat (2018) [https://doi.org/10.1002/cnma.201800371 DOI] | ||
'''Large Area Three- Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects''' | *;'''Large Area Three- Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects''' | ||
<u>Chang, B.</u>, Zhou, C., Tarekegne, A., Yang, Y., Zhao, D., Jensen, F., Hübner, J., Jansen, H. | :<u>Chang, B.</u>, Zhou, C., Tarekegne, A., Yang, Y., Zhao, D., Jensen, F., Hübner, J., Jansen, H. | ||
Advanced Optical Materials (2018) [https://doi.org/10.1002/adom.201801176 DOI] | :Advanced Optical Materials (2018) [https://doi.org/10.1002/adom.201801176 DOI] | ||
===Publications as co-author === | ===Publications as co-author === | ||
Revision as of 08:50, 11 December 2018
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Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications
- Project type: Ph.d. project
- Project responsible: Bingdong Chang
- Supervisors:Henri Jansen, Flemming Jensen, Jörg Hübner
- Partners involved: DTU Danchip
Project Description
Publications in peer-reviewed journal papers
Publications as first author
- DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process
- Chang, B., Leussink, P., Jensen, F., Hübner, J. and Jansen, H.,
- Microelectronic Engineering, 191, pp.77-83 (2018) DOI
- DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro-and nanostructures by a modified Bosch etch process
- Chang, B., Jensen, F., Hübner, J. and Jansen, H
- Journal of Micromechanics and Microengineering, 28(10), p.105012 (2018) DOI
- Confined Growth of ZIF‐8 Nanocrystals with Tunable Structural Colors
- Chang, B., Yang, Y., Jansen, H., Ding, F., Mølhave, K. and Sun, H.
- Advanced Materials Interfaces, 5(9), p.1701270 (2018) DOI
- Highly Ordered 3D Silicon Micro‐Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion
- Chang, B., Tang, Y., Liang, M., Jansen, H., Jensen, F., Wang, B., Mølhave, K., Hübner, J. and Sun, H.
- ChemNanoMat (2018) DOI
- Large Area Three- Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects
- Chang, B., Zhou, C., Tarekegne, A., Yang, Y., Zhao, D., Jensen, F., Hübner, J., Jansen, H.
- Advanced Optical Materials (2018) DOI
Publications as co-author
Inductively coupled plasma nanoetching of atomic layer deposition alumina
Han, A., Chang, B., Todeschini, M., Le, H. T., Tiddi, W., and Keil, M.
Microelectronic Engineering (2018) DOI