Revision as of 09:59, 29 November 2018

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The Logitech Orbis Polisher (CMP) is for polishing wafers (removing material in the nm range) it is not for thinning down wafers or other substrates.

The user manual, user APV, technical information and contact information can be found in LabManager:

Revision as of 09:57, 29 November 2018 view source Rkch (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 271 edits →‎Polisher/Lapper ← Older edit		Revision as of 09:59, 29 November 2018 view source Rkch (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 271 edits →‎Polisher/Lapper Newer edit →
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	<!-- give the link to the equipment info page in LabManager: -->		<!-- give the link to the equipment info page in LabManager: -->
	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&~~page_id~~=169 The Logitech Orbis (CMP) in LabManager]		[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=169 The Logitech Orbis (CMP) in LabManager]