Specific Process Knowledge/Back-end processing/Polisher CMP: Difference between revisions
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== Polisher/Lapper == | |||
[[image:Logitech pm5 1.jpg|400px|right|thumb|The Logitech PM5 Polisher/Lapper]] | |||
The Logitech Orbis Polisher (CMP) is for polishing wafers (removing material in the nm range) it is not for thinning down wafers or other substrates. | |||
'''The user manual, user APV, technical information and contact information can be found in LabManager:''' | |||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=299 The Logitech PM5 Polisher/Lapper in LabManager] | |||
Revision as of 09:55, 29 November 2018
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Polisher/Lapper
The Logitech Orbis Polisher (CMP) is for polishing wafers (removing material in the nm range) it is not for thinning down wafers or other substrates.
The user manual, user APV, technical information and contact information can be found in LabManager: