Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]] | *[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]] | ||
==E-beam evaporation of Aluminium== | |||
Aluminium can be deposited be e-beam assisted evaporation in wordentec, Physimeca and Temescal | |||
*[[/Al Ebeam evaporation in Temescal |Al e-beam evaporation in Temescal]] | |||
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==Thermal deposition of Aluminium== | ==Thermal deposition of Aluminium== | ||