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Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions

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*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]]
*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]]
==E-beam evaporation of Aluminium==
Aluminium can be deposited be e-beam assisted evaporation in wordentec, Physimeca and Temescal
*[[/Al Ebeam evaporation in Temescal |Al e-beam evaporation in Temescal]]
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==Thermal deposition of Aluminium==
==Thermal deposition of Aluminium==