Specific Process Knowledge/Etch: Difference between revisions
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== Choose a wet etch == | == Choose a wet etch == | ||
*[[Wet Silicon Nitride Etch]] | *[[/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | ||
*[[Wet Silicon Oxide Etch (BHF)]] | *[[/Wet Silicon Oxide Etch (BHF)|Wet Silicon Oxide Etch (BHF)]] | ||
*[[KOH Etch]] - ''Anisotropic silicon etch'' | *[[/KOH Etch|KOH Etch]] - ''Anisotropic silicon etch'' | ||
*[[Wet Polysilicon Etch]] - ''Isotropic silicon etch'' | *[[/Wet Polysilicon Etch|Wet Polysilicon Etch]] - ''Isotropic silicon etch'' | ||
*[[Wet Aluminium Etch]] | *[[/Wet Aluminium Etch|Wet Polysilicon Etch]] | ||