Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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'''**''' ''For thicknesses above 200 nm please get permission from ThinFilm group by writing to metal@danchip.dtu.dk'' | '''**''' ''For thicknesses above 200 nm please get permission from ThinFilm group by writing to metal@danchip.dtu.dk'' | ||
'''**''' ''For thicknesses above 120 nm please get permission from ThinFilm group by writing to thinfilm@danchip.dtu.dk'' | '''***''' ''For thicknesses above 120 nm please get permission from ThinFilm group by writing to thinfilm@danchip.dtu.dk'' | ||
==Aluminium deposition on ZEP520A for lift-off== | ==Aluminium deposition on ZEP520A for lift-off== | ||