Jump to content

Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions

Reet (talk | contribs)
Reet (talk | contribs)
Line 91: Line 91:
|-  
|-  
|}
|}
''*'' ''The variation is defined as (max-min)/average for the various points measured on the wafer. The max was around the center and the min somewhere along the edge in all cases. The exact location of the max thickness depends on placing the sample above the point of max material flux.''
''*'' ''The variation is defined as (Max-Min)/Average for the various points measured on the wafer. The max. point was around the center and the min. somewhere along the edge. The exact location of the maximum thickness depends how the sample is placed relative to the point of maximum material flux.''