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Specific Process Knowledge/Lithography/Coaters/SprayCoater: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, danchip
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DCH-Employees-701, NLAB-Employees-701, danchip
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*Spraying imprint resists  (primarily mr-NIL 6000E and mr-I 8000E series have been tested so far)
*Spraying imprint resists  (primarily mr-NIL 6000E and mr-I 8000E)
*Spraying photoresist (primarily AZ 4562, AZ 4999 and AR-N 7520 have been tested so far)
*Spraying photoresist (primarily AZ-4562)
*Spraying of other solutions
*Spraying of other solutions
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