Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
| Line 9: | Line 9: | ||
We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (''Not 'Add Single Peak' ''). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'. | We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (''Not 'Add Single Peak' ''). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'. | ||
[[File:ALD-Sandwich- | [[File:ALD-Sandwich-40a.jpg|700px]] | ||
So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to move anywhere to find a minimum error. | So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to move anywhere to find a minimum error. | ||