Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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*'' Ti metal gives asymmetric Ti2p peak shapes'' | *'' Ti metal gives asymmetric Ti2p peak shapes'' | ||
** ''TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.'' | ** ''TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.'' | ||
[[File:Ti ref1.PNG]] | |||
* ''Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)'' | * ''Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)'' | ||
** ''Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).'' | ** ''Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).'' | ||