Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 53: / Line 53: @@
 == The Ti2p peak ==
 The titanium Ti2p peak is notoriously difficult to fit. From [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview |XPS Knowledge view]] we have:
- * Ti metal gives asymmetric Ti2p peak shapes
+* Ti metal gives asymmetric Ti2p peak shapes
- ** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.
+** TiO<sub>2</sub> has symmetric peak shapes and TiN has complex peak shape, involving satellite features.
- *Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)
+*Ti2p peak has significantly split spin-orbit components (Δ<sub>metal</sub>=6.1 eV)
- ** Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).
+** Splitting Δ-value varies with chemical state (Δ<sub>nitride</sub>=6.0 eV,Δ<sub>oxide</sub>=5.7 eV).
- ** Typically FWHM for each spin-orbit component is the same, but for Ti2p the Ti2p<sub>1/2</sub> component is much broader than the Ti2p<sub>3/2</sub> peak.
+** Typically FWHM for each spin-orbit component is the same, but for Ti2p the Ti2p<sub>1/2</sub> component is much broader than the Ti2p<sub>3/2</sub> peak.
- *** Consequently, Ti2p<sub>1/2</sub> peak is much shorter than expected.
+*** Consequently, Ti2p<sub>1/2</sub> peak is much shorter than expected.
- *** Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.)
+*** Caused by Coster-Kronig effect. (Post-ionization, Ti2p<sub>1/2</sub> is very short lived compared to Ti2p<sub>3/2</sub> state.)
- *** Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.
+*** Causes difficulty in accurately peak fitting Ti2p region with multiple chemical states.