Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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# At etch levels 1 to 9 the fitting routine is struggling to fit the intensity at binding energies around 16 and 18 eV. This points strongly towards the presence of intermediate oxidation steps. | # At etch levels 1 to 9 the fitting routine is struggling to fit the intensity at binding energies around 16 and 18 eV. This points strongly towards the presence of intermediate oxidation steps. | ||
The | We add a third Hf4f doublet and label it 'Intermediate' - this is also suggested in The [[Specific Process Knowledge/Characterization/XPS/Processing/XPSknowledgeview |'''XPS Knowledge view''']] for hafnium. A single peak is also added and labelled 'Valence', see below. The binding energies of the peaks are constrained as shown below. | ||
[[File:ALD-Sandwich-48a.jpg|700px]] | |||