Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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In image above the following has been done: | In image above the following has been done: | ||
# Two doublets are added and labelled 'Oxide' and 'Reduced'. Both peaks of each spin-orbit couple are renamed. | # Two Hf4f doublets are added and labelled 'Oxide' and 'Reduced'. Both peaks of each spin-orbit couple are renamed. | ||
# Two constraints are added on the binding energies as indicated with red boxes: The oxide peak is constrained within the [18-19] | # Two constraints are added on the binding energies as indicated with red boxes: The binding energy of Hf4f7 oxide peak is constrained within the [18-19 eV] range and the reduced Hf4f7 peak is constrained within [14-15 eV]. | ||
# In order to apply the binding energy constraints and the changes in peak names to all etch levels, we first select the entire peak fit table by pressing the upper left corner of the table labelled 'Ref.' (indicated by the yellow arrow). | |||
# With the entire peak table highlighted press the 'Propagate constraints and values to all levels' to the right of the table (indicated by a green square). | |||