Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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Etch level 0 shown above only contains the oxidized Hf4f peak - it does not have any information on the location of any reduced states. Therefore scroll to etch level 2 and add two doublets. With two or more peaks in the fitting routine we have to add some constraints on the peaks in order to maintain order and physics. | Etch level 0 shown above only contains the oxidized Hf4f peak - it does not have any information on the location of any reduced states. Therefore scroll to etch level 2 and add two doublets. With two or more peaks in the fitting routine we have to add some constraints on the peaks in order to maintain order and physics. | ||
[[File:ALD-Sandwich-45a.jpg|700px]] | |||
[[File:ALD-Sandwich- | |||
In image above the following has been done: | In image above the following has been done: | ||
# Two doublets are added and labelled 'Oxide' and 'Reduced'. Both peaks of each spin-orbit couple are renamed. | # Two doublets are added and labelled 'Oxide' and 'Reduced'. Both peaks of each spin-orbit couple are renamed. | ||
# Two constraints are added on the binding energies as indicated with red boxes: The oxide peak is constrained within the [18-19] | # Two constraints are added on the binding energies as indicated with red boxes: The oxide peak is constrained within the [18-19] | ||