Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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The Hf4f peak is fitted next. Maximize the peak and click 'Peak Fit'. | The Hf4f peak is fitted next. Maximize the peak and click 'Peak Fit'. | ||
[[File:ALD-Sandwich-42.jpg]] | |||
[[File:ALD-Sandwich-42. | |||
Add two doublets that will be labelled 'Oxide' and 'Reduced'. | Add two doublets that will be labelled 'Oxide' and 'Reduced'. | ||
Revision as of 09:16, 22 October 2018
Processing of high resolution scanned spectra
The analysis is continued from here.
The Al2p peak
We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (Not 'Add Single Peak' ). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'.
So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to move anywhere to find a minimum error.
Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts around etch levels 22-24 but we will ignore that for now. Whether caused by actual chemical shifts (the appearance of intermediate oxidation states of Al2p that causes the spectrum to shift) or poor energy calibration is too soon to say. The O1s peak will probably hold some clues about this.
The Hf4f peak
The Hf4f peak is fitted next. Maximize the peak and click 'Peak Fit'.
Add two doublets that will be labelled 'Oxide' and 'Reduced'.