Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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The analysis is continued from [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|'''here''']]. | The analysis is continued from [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|'''here''']]. | ||
== The Al2p peak == | |||
We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (''Not 'Add Single Peak' ''). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'. | We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (''Not 'Add Single Peak' ''). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'. | ||
Revision as of 08:57, 22 October 2018
Processing of high resolution scanned spectra
The analysis is continued from here.
The Al2p peak
We start with the Al2p scan. Below is shown the etch level 23. Click 'Peak Fit' and select 'Add doublet' (Not 'Add Single Peak' ). In the tab 'Fit Peaks' of the 'Peak Fitting' panel click 'Fit All Levels'.
So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to move anywhere to find a minimum error.
Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts but we will ignore that for now.
