Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned: Difference between revisions
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So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to shift binding energy or FWHM. | So far we did not add any constraints at all. That means the Al2p spin orbit doublet is free to shift binding energy or FWHM. | ||
Scrolling through the etch levels (seen in the bottom of the image below slightly to the right) one can see that the fitting is good. There is some energy shifts but we will ignore that for now. | |||
[[File:ALD sandwidh Al2p.gif]] | [[File:ALD sandwidh Al2p.gif]] | ||