Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey: Difference between revisions
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As seen above there is only a very small amount of Ti2p. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes. | As seen above there is only a very small amount of Ti2p. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes. | ||
[[File:ALD sandwich Ti survey.gif|630px]] | |||
In the gif file above one can see the etch level in the bottom center right. The fitting routine adds a background to the data and subtracts it from the data before the peak is fitted. This background is shown with a light green color. It is clear that something goes wrong; the fitted backrground eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum. | |||