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Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
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[[File:ALD-Sandwich-27.jpg|700px]]
[[File:ALD-Sandwich-27.jpg|700px]]
In the profile below there is a few problems.
[[File:ALD-Sandwich-29.jpg|700px]]
As seen above:* The O1s content is some 80-90% until the layer containing Al2p is reached.* The Hf4f is not there* There is only a very small amount of Ti2p