Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1: Difference between revisions
Created page with "= XPS analysis of ALD deposited layers = == How to fit data with multiple spectra and levels == ; Use one processing grid to hold all spectra to be fitted. : Each processing..." |
No edit summary |
||
| Line 1: | Line 1: | ||
= XPS analysis of ALD deposited layers = | = XPS analysis of ALD deposited layers = | ||
[[File:Experiment 2.xls]] | |||
== How to fit data with multiple spectra and levels == | == How to fit data with multiple spectra and levels == | ||
Revision as of 15:02, 15 October 2018
XPS analysis of ALD deposited layers
How to fit data with multiple spectra and levels
- Use one processing grid to hold all spectra to be fitted.
- Each processing grid has a peak table that holds all the peaks for each level. Making depth profiles cannot be made across processing grids. Survey spectra must be kept in separate grids - if not the peak table of the survey spectrum will get mixed with the high resolution spectra.
- Do not mix snapshot and scanned spectra in processing grid