Specific Process Knowledge/Characterization: Difference between revisions
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==Overview of characteristics and where to measure it== | ==Overview of characteristics and where to measure it== | ||
{| {{table}} | {| {{table}} | ||
| width="50" align="center" style="background:#f0f0f0;"| | | width="50" align="center" style="background:#f0f0f0;"| | ||
| width="50" align="center" style="background:#f0f0f0;"|'''Micro- scopes''' | | width="50" align="center" style="background:#f0f0f0;"|'''Micro- scopes''' | ||
| width="50" align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)''' | | width="50" align="center" style="background:#f0f0f0;"|'''SEM (incl. EDX)''' | ||