Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
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*Approximately room temperature | *Approximately room temperature. | ||
Higher for refractive metals that require a lot of heat to evaporate, see above. | |||
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|style="background:LightGrey; color:black"|Process pressure | |style="background:LightGrey; color:black"|Process pressure | ||