Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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==The e-beam and the Cu hearth== | ==The e-beam and the Cu hearth== | ||
[[File:Cu hearth 2.jpg|100px|left|thumb|Empty 6-pocket Temescal copper | [[File:Cu hearth 2.jpg|100px|left|thumb|Empty 6-pocket Temescal copper hearth (from Fil-Tech)]] | ||
[[File:Cu hearth.jpg|200px|right|thumb|E-beam impinging on the target from the filament and a 6-pocket Temescal copper hearth and filament assembly enclosed by shields (from Scotech)]] | [[File:Cu hearth.jpg|200px|right|thumb|E-beam impinging on the target from the filament and a 6-pocket Temescal copper hearth and filament assembly enclosed by shields (from Scotech)]] | ||