Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions

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-| Substrates will get heated during a longer deposition. During a 100 nm deposition at 2 Å/s, the substrate reached about 105 °C.
+| Substrates get heated during the deposition.
+For 100 nm Nb at 2 Å/s, the substrate reached about 105 °C.
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 |}