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Specific Process Knowledge/Thin film deposition/Deposition of Copper: Difference between revisions

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== Studies of Cu deposition processes ==
== Studies of Cu deposition processes ==


[[/Deposition of Copper|Roughness of Cu layers]] - ''Roughness of Cu layers deposited with Alcatel''
[[/Deposition of Copper|Roughness of Cu layers]] - ''Roughness of Cu layers deposited with the Alcatel e-beam evaporator''