Specific Process Knowledge/Thin film deposition/Deposition of Zinc: Difference between revisions
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*The thickness /rate measurement may not have been accurate as the crystal monitor looked irregularly coated after the deposition. | *The thickness /rate measurement may not have been accurate as the crystal monitor looked irregularly coated after the deposition. | ||
Note that Zn sublimes. | |||
When we asked other labs about Zn evaporation, they mostly said to try to avoid it and perhaps to try to cool the substrate. An employee at the UCSB Nanofabrication Facility had tried thermal evaporation of Zn and says that their chamber now has status as Zn contaminated, but they have had no user complaints and it is now a long time since they did the deposition. Their chamber is mostly used for III-V materials. They used wires of Zn rather than pellets. | When we asked other labs about Zn evaporation, they mostly said to try to avoid it and perhaps to try to cool the substrate. An employee at the UCSB Nanofabrication Facility had tried thermal evaporation of Zn and says that their chamber now has status as Zn contaminated, but they have had no user complaints and it is now a long time since they did the deposition. Their chamber is mostly used for III-V materials. They used wires of Zn rather than pellets. | ||