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Specific Process Knowledge/Thin film deposition/Temescal/Acceptance Test: Difference between revisions

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[[:File:Temescal Acceptance Test Results Mar-April-May 2018.pdf]]
[[:File:Temescal Acceptance Test Results Mar-April-May 2018.pdf]]


= Vacuum performance =
== Vacuum performance ==
 
Pumpdown of the load lock from atmosphere took 15 minutes to below 10<sup>-6</sup> Torr, which is the process pressure. Note that this was with a brand new vacuum chamber. The pumping time is slower the more material is deposited inside the machine, as the layers can trap moisture and other gases.
 
A pumpdown of the whole system took about 1.5 hours to below 10<sup>-6</sup> Torr.
 
More results in the full report.
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