Specific Process Knowledge/Thin film deposition/Temescal/Acceptance Test: Difference between revisions

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	==Acceptance test and test results==		=Acceptance test and test results=

	In the acceptance test, we tested the vacuum performance, the ion source, and the uniformity of the deposited metal films.		In the acceptance test, we tested the vacuum performance, the ion source, and the uniformity of the deposited metal films.