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Specific Process Knowledge/Thin film deposition/Deposition of Ruthenium: Difference between revisions

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New page comparing Temescal and Lesker for Ruthenium dep. Before it was only Lesker
 
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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  |-style="background:WhiteSmoke; color:black"
  |-style="background:WhiteSmoke; color:black"
! Comment
! Comment
|Please contact the thin film group before you deposit Ru, even if Ru is present in the machine.  
|Please contact the thin film group before depositing Ru, even if Ru is in the machine.  
The current target material belongs to a specific customer.
The current target material belongs to a specific customer.
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