Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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** CSAR, ZEP, PMMA/MMA, HSQ(FOx) | ** CSAR, ZEP, PMMA/MMA, HSQ(FOx) | ||
*Coating of UV resists | *Coating of UV resists | ||
**AZ5214E, AZ4562, AZMiR701, AZnLOF | **AZ5214E, AZ4562, AZMiR701, AZnLOF, SU-8 | ||
*Coating of imprint resists | *Coating of imprint resists | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||