Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions
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*Fill the ultrasonics bath (the one made of metal) with DI water (enough to completely cover your samples) | *Fill the ultrasonics bath (the one made of metal) with DI water (enough to completely cover your samples) | ||
*Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do '''''NOT''''' use undiluted Triton X-100) | *Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do '''''NOT''''' use undiluted Triton X-100) | ||
*Close the bath lid to minimize noise from the ultrasonics bath | |||
*Start ultrasonics on the front panel | *Start ultrasonics on the front panel | ||
*Leave sample in ultrasonics for 10 min | *Leave sample in ultrasonics for 10 min | ||