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Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, danchip
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Choi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, danchip
641 edits
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*Fill rinse bath with DI water and rinse samples
*Fill rinse bath with DI water and rinse samples
*Remove samples and dry them
*Remove samples and dry them
*Dump the Triton X-100 and rinse bath to drain. Rinse tanks with DI water.
*Dump Triton X-100 and the rinse water baths to drain. Rinse tanks with DI water. Leave dump valve open so the bath drains completely
*Continue with piranha.
*Continue with piranha.
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