Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions
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===Procedure=== | ===Procedure=== | ||
*Fill | *Fill tank with DI water (enough to completely cover your samples) | ||
*Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use the undiluted Triton X-100) | *Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use the undiluted Triton X-100) | ||
*Start ultrasonics using the front panel button | *Start ultrasonics using the front panel button | ||