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Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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Line 149: Line 149:
| ~74µm  
| ~74µm  
|-
|-
|[[/PulseEnergy|Pulse energy]]
|Pulse energy
| 0,07µJ (TB)
| 0,07µJ (TB)
| 140µJ (TB) / 800 µJ (IPG)
| 140µJ (TB) / 800 µJ (IPG)
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