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Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch/nBoost04: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
Line 25: Line 25:
| Pegasus/jmli
| Pegasus/jmli
| 3 minute TDESC clean + 30 sec barc etch  
| 3 minute TDESC clean + 30 sec barc etch  
| danchip/jml/nano/nanoboost/nboost04 100 cycles or 13 minutes  
| nanolab/jml/nano/nanoboost/nboost04 100 cycles or 13 minutes  
| S004436
| S004436
|  
|  
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