Specific Process Knowledge/Thin film deposition/Deposition of Chromium: Difference between revisions
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→Chromium deposition: updated with Lesker and Temescal |
→Chromium deposition: removed dead link |
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| Line 41: | Line 41: | ||
|0.5Å/s to 10Å/s | |0.5Å/s to 10Å/s | ||
|10Å/s to 15Å/s (e-beam) | |10Å/s to 15Å/s (e-beam) | ||
Sputtering: | Sputtering: Depends on process parameters. See process log. | ||
|10Å/s | |10Å/s | ||
|Depends on process parameters. See process log. | |Depends on process parameters. See process log. | ||