Specific Process Knowledge/Characterization/XRD: Difference between revisions
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Thickness: 0~21 mm | Thickness: 0~21 mm | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"| | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Incident side | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Cross Beam Optics(CBO) | ||
*Ge(220)x2 monochromator | |||
*In-Plane Parallel Slit Collimator (PSC) | |||
*Soller slit | |||
*Variable divergence slit | |||
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Receiver side | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Automatic variable scattering slit | ||
*Automatic variable receiver slit | |||
*Parallel slit analysers (PSA) | |||
*Ge(220)x2 analyser | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||