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Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions

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→Thermal deposition of Aluminium: Added Temescal to comparative chart, added pumping times, and added Physimeca
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==Sputtering of Aluminium==
==Sputtering of Aluminium==


Aluminium may be sputter deposited in either Wordentec of PVD co-sputter/evaporation
Aluminium may be sputter deposited in either Wordentec or the Lesker sputter system.


*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]]
*[[/Sputter rates for Al|Sputtering of Aluminium of Wordentec]]
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