Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
Added links to cross-contamination sheet for allowed substrates and materials |
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*Less accurate for films below 20 nm | *Less accurate for films below 20 nm | ||
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!style="background:silver; color:black" align="left" valign="top" rowspan=" | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Process parameter range | ||
|style="background:LightGrey; color:black"|Process Temperature | |style="background:LightGrey; color:black"|Process Temperature | ||
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* Below 1*10<sup>-6</sup> mbar before deposition starts | * Below 1*10<sup>-6</sup> mbar before deposition starts | ||
* Below 5*10<sup>-6</sup> mbar during deposition | * Below 5*10<sup>-6</sup> mbar during deposition | ||
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|style="background:LightGrey; color:black"|Source-substrate distance | |||
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*69.85 cm | |||
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!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates | !style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates | ||
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'''**''' ''Defined as the ratio of the standard deviation to the average of the measurement made using the DektakXT'' | '''**''' ''Defined as the ratio of the standard deviation to the average of the measurement made using the DektakXT'' | ||
==Quality control (QC) for the Temescal== | ==Quality control (QC) for the Temescal== | ||