LabAdviser/Technology Research/Nanoscale characterization of ultra-thin metal films for nanofabrication applications: Difference between revisions
| Line 37: | Line 37: | ||
** '''Overview:''' [[/SEM-LEO Customizations for Organic Ice Resists|SEM-LEO Customizations for Organic Ice Resists]] | ** '''Overview:''' [[/SEM-LEO Customizations for Organic Ice Resists|SEM-LEO Customizations for Organic Ice Resists]] | ||
*; In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) trilayer thin films | |||
*: [[File:2.jpg|300px]] | |||
*: [https://www.sciencedirect.com/science/article/pii/S0169433218313187 Link to Article] | |||
*: A. B. da Silva Fanta, <u>M. Todeschini</u>, A. Burrows, H. Jansen, C. D. Damsgaard, H. Alimadadi, and J. B. Wagner<br> ''Materials Characterization'', vol. 139, pp. 452-462, 2018. | |||
** '''Overview:''' [[/SEM-LEO Customizations for Organic Ice Resists|SEM-LEO Customizations for Organic Ice Resists]] | |||
*; Inductively coupled plasma nanoetching of atomic layer deposition alumina | *; Inductively coupled plasma nanoetching of atomic layer deposition alumina | ||