Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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=== InP/InGaAsP/InGaAs etch === | === InP/InGaAsP/InGaAs etch 2011 === | ||
Unselective etch for large sized features and small aspect ratios by David Larsson, DTU Photonics, 2011 | Unselective etch for large sized features and small aspect ratios by David Larsson, DTU Photonics, 2011 | ||