Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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** Undercut features | ** Undercut features | ||
* '''Aspect ratio dependent etching''': Trenches with high aspect ratios typically etch faster in the beginning of the etch process compared to the end because of aspect ratio dependent etching. The correct approach would be to establish an initial and a final etch rate but that requires more elaborate measurements. | * '''Aspect ratio dependent etching''': Trenches with high aspect ratios typically etch faster in the beginning of the etch process compared to the end because of aspect ratio dependent etching. The correct approach would be to establish an initial and a final etch rate but that requires more elaborate measurements. | ||
* '''Scallops''': | * '''Scallops''': The scallops from the Bosch process | ||
* | * | ||
=== Where have these numbers been used? === | === Where have these numbers been used? === | ||
* [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA#Results:_Etched_depths_in_trenches_of_different_widths| Investigation of Process A performance on Pegasus 1] | * [http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA#Results:_Etched_depths_in_trenches_of_different_widths| Investigation of Process A performance on Pegasus 1] | ||