Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
| Line 70: | Line 70: | ||
; Selectivity | ; Selectivity | ||
: <math> \tfrac{\mathrm{ED}{\mathrm{MT-MR} </math> | : <math> \tfrac{\mathrm{ED}}{\mathrm{MT-MR}} </math> | ||
; CD loss (nm per edge) | ; CD loss (nm per edge) | ||