Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
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; Sidewall bowing (%) | ; Sidewall bowing (%) | ||
: The sidewall bowing is a measure of how much the sidewall profile deviates from a straight line - regardless of what angle it is at: | : The sidewall bowing is a measure of how much the sidewall profile at mid-depth deviates from a straight line drawn between - regardless of what angle it is at: | ||
: <math> \sin(\cos^{-1}(\tfrac{\mathrm{TW-BW}}{2 \sqrt{\mathrm{ED}^2+(\tfrac{\mathrm{TW}-\mathrm{BW}}{2})^2}})) \times \tfrac{\mathrm{MW} - \tfrac{\mathrm{TW}+\mathrm{BW}}{2}}{2\sqrt{\mathrm{ED}^2+(\tfrac{\mathrm{BW}-\mathrm{TW}}{2})^2}}</math> | : <math> \sin(\cos^{-1}(\tfrac{\mathrm{TW-BW}}{2 \sqrt{\mathrm{ED}^2+(\tfrac{\mathrm{TW}-\mathrm{BW}}{2})^2}})) \times \tfrac{\mathrm{MW} - \tfrac{\mathrm{TW}+\mathrm{BW}}{2}}{2\sqrt{\mathrm{ED}^2+(\tfrac{\mathrm{BW}-\mathrm{TW}}{2})^2}}</math> | ||