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| Line 71: |
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| : <math> \cos^{1}(\tfrac{ | | : <math> \cos^{1}(\tfrac{ |
| \alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | | \alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> |
|
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| == Parameters ==
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| <!-- revised 1/6-2015 by jmli -->
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| {| border="2" cellspacing="0" cellpadding="0" align="left"
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| ! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]]
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| |-
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| | colspan="2" width="300px"| In the image the following parameters are shown:
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| * Top Width (TW)
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| * Depth (D)
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| * Bottom Width (BW)
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| * Mid Width (MW)
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| To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar (the blue circle).
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| |-
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| ! Depth
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| | D*PS
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| |-
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| ! Bowing
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| | <math>2\frac{MW-\frac{TW+BW}{2}}{(TW+BW)}</math>
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| |-
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| ! Sidewall angle
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| | <math>acos(\frac{TW-BW}{2\sqrt{D^2+\frac{1}{4}(TW^2-BW^2)}}) </math>
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| |-
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| |}
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|
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| {{tiny|tiny}} tiny
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