Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
No edit summary |
|||
| Line 5: | Line 5: | ||
The challenge is here to get the best information possible about the profile with as little effort as possible. The information acquired must be simple and useful. | The challenge is here to get the best information possible about the profile with as little effort as possible. The information acquired must be simple and useful. | ||
[[File: | [[File:etched profiles (3).PNG|800px]] | ||
=== Input parameters === | === Input parameters === | ||
| Line 68: | Line 68: | ||
: <math> \cos^{-1}(\tfrac{ | : <math> \cos^{-1}(\tfrac{ | ||
\alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | \alpha}{\sqrt{\mathrm{ED}^2+\alpha^2}}) </math> with <math> \alpha = \tfrac{\mathrm{TW}-\mathrm{BW}}{2} </math> | ||
== Parameters == | == Parameters == | ||