Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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===Sample pattern before etching=== | ===Sample pattern before etching=== | ||
<gallery caption=" | <gallery caption="Oxide mask before etching." widths="500px" heights="400px" perrow="3"> | ||
Image:S0_oxide_01.jpg|Top view of the SiO2 mask before etching | Image:S0_oxide_01.jpg|Top view of the SiO2 mask before etching | ||