Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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==InP etching June 2018== | ==InP etching June 2018== | ||
Done by Kabi and Bghe @danchip | ''Done by Kabi and Bghe @danchip'' | ||
===Sample pattern before etching=== | ===Sample pattern before etching=== | ||
<gallery caption="Result of InP etching." widths="500px" heights="400px" perrow="3"> | <gallery caption="Result of InP etching." widths="500px" heights="400px" perrow="3"> | ||