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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
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Comparing differences in etched trenches requires a set of common parameters for each trench. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation|here]] to find more information about the parameters used on the DRIE-Pegasus process development.
Comparing differences in etched trenches requires a set of common parameters for each trench. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation|here]] to find more information about the parameters used on the DRIE-Pegasus process development.


'''Material from SPTS'''


*[[Specific Process Knowledge/Etch/DRIE-Pegasus/SPTSdocs|Hardware and process applications]]
'''Internal Danchip Process log for Pegasus 1'''
 
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|Miscellaneous information]]
 
'''Internal Danchip Process log'''


Process log at Danchip [http://labintra.danchip.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]
Process log at Danchip [http://labintra.danchip.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]
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