Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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The modification was also done on Pegasus 2 before we started using it. | The modification was also done on Pegasus 2 before we started using it. | ||
== Comparison of continuous processes == | == Comparison of continuous processes on Pegasus 1== | ||
=== Black silicon recipe === | === Black silicon recipe === | ||